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| Elextrostatic and Electromagnetic Fields Actuators for MEMS AD/DA Converters
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Full
text: |
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Source |
International Journal of Engineering (IJE) |
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Table of Contents |
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Complete Issue PDF(4.38MB) |
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Volume: 2 Issue: 1 |
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Pages: 1-68 |
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Publication
Date: February 2008 |
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ISSN
(Online): 1985-2312 |
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Pages |
35 - 41 |
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Author(s) |
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Published
Date |
30-02-2008 |
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Publisher |
CSC
Journals, Kuala Lumpur,
Malaysia |
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ADDITIONAL
INFORMATION |
| Keywords Abstract References Cited by Related Articles Collaborative
Colleague |
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KEYWORDS: ADC, DAC, MEMS, Electrostatic, Electromagnetic |
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| MEMS Analog -to-digital and digital-to- analog converters are proposed using electrostatic field and
electromagnetic fields actuators. For the former, parallel deformable plates supported by springs are used with
bias applied voltage which determines the amount of static displacement needed for equilibrium condition. For the
latter, coil winding(s) are embedded in a rotating plate, which is exposed to a constant field of a permanent
magnet, causing the plate to deflect according to the currents in the windings. In the analog-to-digital
arrangement, different spring displacements are tapped off either the spring in case of electrostatic or the moving
plate in case of electromagnetic actuators, corresponding to the binary decoded currents. At these off tapping
points, logic high signal levels are applied at these locations so that when a certain analog voltage is applied on
the moving plate of the capacitor, the spring is displaced to one of these locations, enabling different binary
voltages to all switches up to that level. Similar result occurs when an analog voltage is applied on the winding.
The digital binary voltages are fed to a priority encoder to obtain the digital value. In digital-to-analog arrangement,
the input binary voltage is decoded to different spring locations which correspond to resistances making up a
potentiometer circuit for the output analog voltage. Similarly; for the electromagnetic actuator, a number of
different length coil windings are embedded within the moving plate, causing different deflections corresponding to
one bit of the binary input. |
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| 1 |
Chang Liu, “Foundations of MEMS", Prentice Hall, PP 105-321 (2006)
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| 2 |
Sabih H. Gerez, ”Algorithms for VLSI Design Automation”, John Wiley, PP 41-131 (1999)
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| 3 |
John Yeager, “Low Level Measurements”, Keithley, 5th edition, PP 2.2 –3.25 (2000)
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John. Craig, "Introduction to Robotics", Prentice Hall, PP 242-300 (2005)
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W. Bolton, "Mechatronics; Electronic Control Systems", Prentice Hall, PP 24-47 (1999)
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| 1 |
S. Büttgenbach , A. Balck , S. Demming , C. Lesche , M. Michalzik and Alaaldeen, “Development of on Chip Devices for Life Science Applications”, International Journal of Engineering (IJE), 3(2), pp. 148 – 158, April 2009.
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| Amir J. Majid : Colleagues
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